| 摘要 |
PROBLEM TO BE SOLVED: To inspect a device, even when a constitution is such that the resolution of an imaging camera that obtains inspection images is lower than the resolution of an image display to be inspected, when inspecting the image display, such as, a display. SOLUTION: In an image inspection method, four images moving in parallel on an imaging element by an image shift mechanism are obtained as electronic image data, and a transformation matrix A is determined that specifies the association between an otained luminance vector I<SB>0</SB>, where each luminance I of pixels contained in the images is aligned and an estimated luminance vector i<SB>0</SB>, wherein each luminance I of the pixels contained in a high-resolution estimated image that is ultimately defined. Then, the inverse matrix B of the transformation matrix A is determined; the estimated luminance vector i<SB>0</SB>is determined by expression: i<SB>0</SB>=BI<SB>0</SB>; the estimated image is determined from the luminance vector estimated. An image reducing processing for converting from the obtained estimated image to a desired resolution is performed, as is necessary. COPYRIGHT: (C)2010,JPO&INPIT
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