| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transporting system with a robot which enables the adoption of a compact layout. SOLUTION: The substrate transporting system is provided with a robot 1, and a substrate carrying out and in means 4, and a substrate processing apparatus 5 are arranged around the robot 1. The robot 1 is provided with: an end effector 22 in which a substrate 100 is held approximately horizontally; a vertical drive means 18 which drives the end effector 22 in a vertical direction; a horizontal drive means 11 which drives the vertical drive means 18 in a horizontal direction; and a rotary drive means which drives the horizontal drive means 11 to rotate about a vertical axis 17. The end of the end effector 22 is connected to the vertical drive means 18, and the end of the vertical drive means 18 is connected to the horizontal drive means 11. COPYRIGHT: (C)2010,JPO&INPIT
|
