| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a static eliminator which effectively removes electric charges on the surface of a glass substrate and a wafer. Ž<P>SOLUTION: The static eliminator has an emitter 4 to emit electron beams 6 arranged in a straight-tube type tube 3 maintained in decompressed atmosphere, and a target film 7 consisting of tungsten which generates soft X-rays by receiving irradiation of the electron beams 6 is formed on the inner face of the tube. Many windows 8 are formed in the tube and the windows are covered with the target film 7, and the target film to cover these windows is protected by a beryllium (Be) film 9 from the outside. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
