THE MANUFACTURE DEVICE AND METHOD OF NANO POWDER AND THE METHOD FOR MAKING THE FILM USING THE SAME AND THE FILM THEREOF

摘要

The invention provides a manufacture device and method of nano powder and a method of manufacturing film and the film using thereof. The nano powder manufacture device includes: vacuum tank, stirred tank, in the said vacuum tank which is used to hold powder supporter; stirring parts, in the stirred tank, the supporter at the lower part of the stirred tank is transferred to the upper part through the vertical spiral rotation, there exists a crevice between the spiral stirring part and the rotation axis both of which rotate through the same axis and is connected with each other through at least one connector, so that the supporter at the upper part of the stirred tank is able to move to the lower part through the crevice; and the deposition apparatus, which is used for the deposition of the nano particle on the supporter using physical deposition manner, the deposition source of the deposition apparatus is in the vacuum tank and above the supporter. The nano powder manufacture device can make the supporter or the supporter chip mix uniformly, and reduce the friction between the supporters or the supporter chips.