| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve on uniformity of light in a silent discharge system discharge tube. Ž<P>SOLUTION: The excimer lamp (1) includes a cylindrical outer cylinder wall (4) having a first electrode (11) fitted on an outer surface, an inner cylinder wall (6) formed in a cylindrical shape smaller in diameter than the outer cylinder wall (4) and having a supported part (6a) protruded further outward than an axis direction end part of the outer cylinder wall (4) and having a second electrode (12) fitted on an inner surface, and a discharge space (8) surrounded by the outer cylinder wall (4), the inner cylinder wall (6), and an end wall (7) with light-emitting gas sealed emitting light at silent discharge. Voltage generating the silent discharge inside the discharge space (8) is impressed between the first electrode (11) and the second electrode (12). Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
