| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor which excellently senses a variation in concentration of a specific gas, while preventing any gas sensing layer from delaminating and without affecting its gas sensitivity. SOLUTION: In the gas sensor 1 having the gas sensing layer 4 which is formed on a substrate 15 and made of a metal oxide semiconductor as the principal component varying its electric property in accordance with the variation in concentration of the specific gas in an environmental atmosphere, the gas sensing layer 4 is configured to conjoin a plurality of particles such that a gas-permeable property in the thickness direction of the gas sensing layer 4 is obtained through voids existing among the plurality of particles. Furthermore, the gas sensor 1 includes: a pair of sensing electrodes 6 which contain an inorganic oxide differing from the metal oxide semiconductor, and are disposed on the substrate 15 and used for sensing a variation in the electric property of the gas sensing layer 4 while contacting the gas sensing layer 4; and a contact layer 7 which contacts with the gas sensing layer 4, wherein a middle region 22 containing the inorganic oxide exists in at least a portion of an interface between the gas sensing layer 4 and the contact layer 7, so as to connect between the contact layer 7 and a particle being inward in regard to the outermost-side particle of the gas sensing layer 4. COPYRIGHT: (C)2010,JPO&INPIT
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