发明名称 PATTERNING OF MAGNETIC THIN FILM USING ENERGIZED IONS AND THERMAL EXCITATION
摘要 A method for patterning a magnetic thin film on a substrate includes: providing a pattern about the magnetic thin film, with selective regions of the pattern permitting penetration of energized ions of one or more elements. Energized ions are generated with sufficient energy to penetrate selective regions and a portion of the magnetic thin film adjacent the selective regions. The substrate is placed to receive the energized ions. The portion of the magnetic thin film is subjected to thermal excitation. The portions of the magnetic thin film are rendered to exhibit a magnetic property different than selective other portions. A method for patterning a magnetic media with a magnetic thin film on both sides of the media is also disclosed.
申请公布号 US2010096256(A1) 申请公布日期 2010.04.22
申请号 US20080255865 申请日期 2008.10.22
申请人 发明人 NALAMASU OMKARAM;VERHAVERBEKE STEVEN;FOAD MAJEED;VENKATESAN MAHALINGAM;KRISHNA NETY M.
分类号 C23F1/02 主分类号 C23F1/02
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