发明名称 COMPOSITION AND METHOD FOR MANUFACTURING IT, POROUS MATERIAL AND METHOD FOR FORMING IT, INTERLAYER INSULATING FILM, SEMICONDUCTOR MATERIAL, SEMICONDUCTOR DEVICE, AND LOW-REFRACTIVE-INDEX SURFACE PROTECTIVE FILM
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a composition capable of producing a porous material having both low relative dielectric constant and high mechanical strength and excellent in storage stability, and to provide a method for manufacturing it. <P>SOLUTION: The composition includes a hydrolysate of an alkoxysilane compound, a hydrolysate of a siloxane compound represented by general formula (1), a surfactant, and an element having an electronegativity of 2.5 or less. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010090389(A) 申请公布日期 2010.04.22
申请号 JP20090280942 申请日期 2009.12.10
申请人 MITSUI CHEMICALS INC 发明人 TAKAMURA KAZUO;TANAKA HIROBUMI
分类号 C08L83/04;C08G77/06;C08J9/26;C08K3/00;H01L21/316 主分类号 C08L83/04
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