发明名称 |
COMPOSITION AND METHOD FOR MANUFACTURING IT, POROUS MATERIAL AND METHOD FOR FORMING IT, INTERLAYER INSULATING FILM, SEMICONDUCTOR MATERIAL, SEMICONDUCTOR DEVICE, AND LOW-REFRACTIVE-INDEX SURFACE PROTECTIVE FILM |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a composition capable of producing a porous material having both low relative dielectric constant and high mechanical strength and excellent in storage stability, and to provide a method for manufacturing it. <P>SOLUTION: The composition includes a hydrolysate of an alkoxysilane compound, a hydrolysate of a siloxane compound represented by general formula (1), a surfactant, and an element having an electronegativity of 2.5 or less. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
申请公布号 |
JP2010090389(A) |
申请公布日期 |
2010.04.22 |
申请号 |
JP20090280942 |
申请日期 |
2009.12.10 |
申请人 |
MITSUI CHEMICALS INC |
发明人 |
TAKAMURA KAZUO;TANAKA HIROBUMI |
分类号 |
C08L83/04;C08G77/06;C08J9/26;C08K3/00;H01L21/316 |
主分类号 |
C08L83/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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