| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform drying processing, while stably and smoothly transporting a large substrate using an inexpensive structure. Ž<P>SOLUTION: An apparatus for drying the substrate includes a mechanism for transporting the substrate W and an air knife 16 which goes obliquely across a path for transporting the substrate W by the mechanism for transporting the substrate. The mechanism for transporting the substrate includes an upstream side roller group arranged in an upstream side region EA of the air knife 16, a downstream side roller group provided in a downstream side region EB, a driving system 50, and an auxiliary supporting apparatus 70 having an auxiliary roller 76. The roller groups consist of unit roller groups G1-G3 and G4-G6 consisting of a plurality of transporting rollers having the same length, respectively. The length of the transporting roller in the unit roller groups G1-G3 and G4-G6 is set to be longer toward an upstream side unit roller group in the upstream side roller group and set to be shorter toward an upstream side unit roller group in the downstream side roller group. The auxiliary supporting apparatus 70 is arranged in spaces S1-S4 formed between the roller groups in the upstream side and the downstream side and the air knife 16. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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