发明名称 Line narrowing module
摘要 An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating. In one application, the apparatus may be used as a line narrowing module for a laser light source.
申请公布号 US2010097704(A1) 申请公布日期 2010.04.22
申请号 US20090653584 申请日期 2009.12.14
申请人 CYMER, INC. 发明人 ALGOTS J. MARTIN;BERGSTEDT ROBERT A.;GILLESPIE WALTER D.;KULGEYKO VLADIMIR A.;PARTLO WILLIAM N.;RYLOV GERMAN E.;SANDSTROM RICHARD L.;STRATE BRIAN;DYER TIMOTHY S.
分类号 G02B27/44 主分类号 G02B27/44
代理机构 代理人
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