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发明名称
摘要
申请公布号	JP4454942(B2)	申请公布日期	2010.04.21
申请号	JP20030048749	申请日期	2003.02.26
申请人		发明人
分类号	C23C14/04;H05B33/10;H01L51/50;H05B33/14	主分类号	C23C14/04
代理机构		代理人
主权项
地址

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