摘要 |
<p>The resonator includes first high-impedance wiring (7a) plate-like, arranged parallel to top-surface ground electrode (4); second high-impedance wiring (7b) plate-like, arranged so as to face first high-impedance wiring (7a); first columnar conductor (9a) electrically connecting first high-impedance wiring (7a) to second high-impedance wiring (7b); first low-impedance wiring (8a) arranged between first high-impedance wiring (7a) and second high-impedance wiring (7b); second columnar conductor (9b) electrically connecting first high-impedance wiring (7a) to first low-impedance wiring (8a); second low-impedance wiring (8b) arranged between first low-impedance wiring (8a) and second high-impedance wiring (7b); and third columnar conductor (9c) electrically connecting second high-impedance wiring (7b) to second low-impedance wiring (8b), to reduce the area size the resonator.</p> |