发明名称 BILAYER LAMINATED FILM FOR BUMP FORMATION AND METHOD OF BUMP FORMATION
摘要 A negative radiation-sensitive two-layer laminated film for forming bumps includes a lower layer that includes a composition including a polymer (A) with a specific structural unit and an organic solvent (B). A process for forming bumps uses the laminated film. The negative radiation-sensitive two-layer laminated film for forming bumps permits excellent printing of a solder paste, is patternable with good configuration, and is easily peeled from a substrate. The bump-forming process using the laminated film provides the same effects.
申请公布号 EP1739487(A4) 申请公布日期 2010.04.21
申请号 EP20050710408 申请日期 2005.02.18
申请人 JSR CORPORATION 发明人 SAKAI, HIROKO;OHTA, MASARU;INOMATA, KATSUMI;IWANAGA, SHIN-ICHIRO
分类号 G03F7/11;G03F7/033;G03F7/09;H01L21/48;H01L21/60;H05K3/34 主分类号 G03F7/11
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