发明名称
摘要 A set of resin sheets includes a plurality of resin sheets. Each resin sheet is disposed in a site to be a surface recess or inner void in a ceramic green sheet to be laminated, and a plurality of such ceramic green sheets each with the resin sheet disposed therein are laminated and fired, whereupon the resin sheets are removed by thermal decomposition during the firing. In the set of resin sheets, the relation of T<SUB>a</SUB><T<SUB>b</SUB><=T<SUB>c </SUB>is satisfied wherein T<SUB>a </SUB>(° C.) indicates an 80% weight reduction temperature of an uppermost resin sheet, T<SUB>b </SUB>(° C.) indicates an 80% weight reduction temperature of a lowermost resin sheet, and T<SUB>c </SUB>(° C.) indicates a 20% weight reduction temperature of a resin binder which is contained in the ceramic green sheets in which the green sheets are disposed.
申请公布号 JP4454390(B2) 申请公布日期 2010.04.21
申请号 JP20040158459 申请日期 2004.05.27
申请人 发明人
分类号 B28B11/00;H01L23/12;B32B18/00;C03B29/00;C03C14/00;C04B35/634;C04B35/638;H01L21/48;H01L23/02;H05K1/03;H05K1/18;H05K3/00;H05K3/46 主分类号 B28B11/00
代理机构 代理人
主权项
地址