发明名称 |
A process for making a micro-fluid ejection device having high resistance heater film |
摘要 |
A process for making a micro-fluid ejection head comprising a semiconductor substrate. The substrate includes a plurality of fluid ejection actuators disposed on the substrate. Each of the fluid ejection actuators includes a thin heater stack comprising a thin film heater and one or more protective layers adjacent the heater. The thin film heater is made of a tantalum-aluminum-nitride thin film material having a nano-crystalline structure consisting essentially of AIN, TaN, and TaAl alloys, and has a sheet resistance from about 30 to about 100 ohms per square. The thin film material contains from about 30 to about 70 atomic% tantalum, from about 10 to about 40 atomic% aluminum and from about 5 to about 30 atomic% nitrogen. |
申请公布号 |
EP2177360(A1) |
申请公布日期 |
2010.04.21 |
申请号 |
EP20100000426 |
申请日期 |
2005.01.20 |
申请人 |
LEXMARK INTERNATIONAL, INC. |
发明人 |
BELL, BYRON V.;GUAN, YIMIN;CORNELL, ROBERT W.;PARISH, GEORGE K. |
分类号 |
B41J2/05;B41J2/14 |
主分类号 |
B41J2/05 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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