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发明名称
MIM-capacitor and corresponding method of manufacturing
摘要
申请公布号
EP1770726(B1)
申请公布日期
2010.04.21
申请号
EP20060119374
申请日期
2006.08.23
申请人
INFINEON TECHNOLOGIES AG
发明人
ENGELHARDT, MANFRED;STICH, ANDREAS;SCHINDLER, GUENTHER;SCHRENK, MICHAEL
分类号
H01L27/13;H01G4/33;H01G4/40;H01L21/02
主分类号
H01L27/13
代理机构
代理人
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