| 摘要 |
A rolling guide device 160 is provided with a track rail 161 as a track member and a movable member 163 mounted to the track rail 161 to be movable through balls 162. A solid lubricant film is formed to the ball 162 by using a closed magnetic field unbalanced magnetron spattering apparatus (CUMS apparatus). The solid lubricant film has a low friction coefficient at the outermost surface of the film, withstands an inner repeated stress, and has a high adhesion performance. Such solid lubricant film has never been from its inside or boundary portion and wears at the minimum speed from the film surface, so that a reliable and highly ideal solid lubricating function can be attained, and by applying the solid lubricant film having improved adhesion performance and abrasion resistance to the rolling guide device, there can be provided a rolling guide device usable in a specific environmental condition such as an undesirable lubricating environment, high temperature vacuum condition, or an oil-free condition. |
