发明名称 METHOD AND APPARATUS FOR APPLYING A LAYER OF A SEPARATING AGENT TO A SUBSTRATE
摘要 During the process for applying a coating of separating agent to a moving or movable substrate in a vacuum chamber, wherein the separating agent is vaporized in the interior of a vaporizing chamber that contains at least one nozzle pointing towards the substrate, liquid separating agent is injected into the interior of the vaporizing chamber to be vaporized. The necessary apparatus for applying a coating of separating agent to a moving or movable substrate in a vacuum chamber, wherein the vacuum chamber contains at least one metal vaporizing apparatus with a vaporizing chamber that contains a nozzle pointing towards the substrate, wherein the separating agent can be supplied to the interior of the vaporizing chamber via a supply pipe, includes that the supply pipe is connected to an injection apparatus, via which the liquid separating agent is or can be injected into the interior of the vaporizing chamber in order to be vaporized.
申请公布号 EP2176440(A2) 申请公布日期 2010.04.21
申请号 EP20080773839 申请日期 2008.07.03
申请人 LEYBOLD OPTICS GMBH 发明人 KUEPER, STEPHAN;SCHMITT, CHRISTOPHER
分类号 C23C14/04;C23C14/56 主分类号 C23C14/04
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