| 摘要 |
PURPOSE: A method for handling polysilazane or a polysilazane solution is provided to obtain polysilazane solution with little deterioration of various characteristics by performing various processes. CONSTITUTION: A method for handling polysilazane or a polysilazane solution comprises: synthesizing polysilazane and preparing the polysilazane solution in a first space isolated from outside air, the first space being mainly supplied with air from which amine, basic substance, volatile organic compound and acidic substance are eliminated. The air from which the amine, basic substance, volatile organic substance and acidic substance are eliminated is formed by allowing outside air to pass through an adsorbent which adsorbs the amine, basic substance, volatile organic substance and acidic substance.
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