发明名称
摘要 <p>PROBLEM TO BE SOLVED: To provide a production control method which is possible to be, in principle, a definite schedule of use ratio of each equipment to each process in an operating period to a subject of middle period production plan in the case that an equipment group and process group are used in common, concerning the suitable production control method which applies to production of TFT substrate for a liquid crystal display equipment. SOLUTION: The load factor which is a ratio of necessary product processing number of the concerned process group of each concerned process is required to product processing capacity at process group to be possible to transfer the capacity each other with common use relation of equipment in common use of equipment group by the process group as a ratio of cumulative production plan of above process to cumulative a production plan of the foregoing each process to cumulative capacity of each above process at the total operation period which is to a subject of middle period production plan and reflect the above most suitable use ratio in short period production plan that calculates suitable use ratio to each above process of each equipment and the concerned load factor to be equal to the above process group at each process.</p>
申请公布号 JP4455720(B2) 申请公布日期 2010.04.21
申请号 JP20000085434 申请日期 2000.03.24
申请人 发明人
分类号 G05B19/418;H01L29/786;G02F1/136;G05B19/00;H01L21/02;H01L21/336 主分类号 G05B19/418
代理机构 代理人
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