Piezoelectric inkjet printhead having temperature sensor and method of attaching temperature sensor to inkjet printhead

摘要

Provided are a piezoelectric inkjet printhead having a temperature sensor and a method of attaching the temperature sensor to the inkjet printhead. The inkjet printhead includes a channel forming plate (100), a piezoelectric actuator (140), and a thermistor chip (165). The piezoelectric actuator includes a lower electrode (141) formed on the channel forming plate, a piezoelectric layer (142) formed on the lower electrode, and an upper electrode (143) formed on the piezoelectric layer. An insulation layer (162) is formed on the lower electrode such that the insulation layer is spaced apart from the piezoelectric layer. An electrode (163) for temperature sensing is formed on the insulation layer, and the thermistor chip is attached on the electrode for temperature sensing using solder. A drive signal line (151) and a signal line (152) for temperature sensing are bonded to the upper electrode and the electrode for temperature sensing, respectively.