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发明名称
Aluminium nitride sintered body, member for semiconductor manufacturing device, and method of manufacturing aluminum nitride sintered body
摘要
申请公布号
EP1837318(A3)
申请公布日期
2010.04.21
申请号
EP20070251163
申请日期
2007.03.20
申请人
NGK INSULATORS, LTD.
发明人
YOSHIKAWA, JUN;KOBAYASHI, YOSHIMASA;YAMADA, NAOHITO
分类号
C04B35/581;H01L21/68
主分类号
C04B35/581
代理机构
代理人
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地址
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