发明名称 APPARATUS FOR TEMPERATURE CONTROLLER AND CONTROL METHOD THEREOF
摘要 PURPOSE: An apparatus for controlling a temperature and a method for driving the same are provided to reduce time and cost for correcting an internal temperature sensor which is installed in a chip by correcting the internal temperature sensor with an external temperature sensor. CONSTITUTION: A plurality of internal temperature sensors(20) measures the internal temperature of a semiconductor chip. An external temperature sensor(10) measures the external temperature of the semiconductor chip. A control unit(40) compares the measured values of the external temperature sensor and the internal temperature sensor. The internal temperature sensor is corrected based on the measured value of the external temperature sensor as a reference value. If the corrected value of the internal temperature sensor is out of the pre-set range, a cooling device cools the semiconductor chip.
申请公布号 KR100953441(B1) 申请公布日期 2010.04.20
申请号 KR20090056904 申请日期 2009.06.25
申请人 CHUNGBUK NATIONAL UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION 发明人 KIM, SHI HO;LEE, HYUN JU
分类号 H01L23/38 主分类号 H01L23/38
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