发明名称 |
Method and apparatus for an actuator having an intermediate frame |
摘要 |
A micromachined actuator including a body or platform mounted to a suspension system anchored to a substrate. In one embodiment, the suspension system is comprised of a set of one or more spring flexures connecting the actuator body to the substrate with strain relief provided via connecting torsional elements. In another embodiment, the suspension system includes a first set of one or more spring flexures each with one end anchored to a largely rigid intermediate frame and the other end attached to the body. A second set of one or more flexures is attached between the intermediate frame and the substrate. A third actuator embodiment maximizes force electrode area to minimize voltage required for electrostatic actuation. A fourth embodiment provides electrical interconnect to an actuator or an actuator array using polysilicon with silicon nitride isolation.
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申请公布号 |
US7699296(B1) |
申请公布日期 |
2010.04.20 |
申请号 |
US20050097053 |
申请日期 |
2005.04.01 |
申请人 |
IRIS AO, INC. |
发明人 |
KNOLLENBERG CLIFFORD F.;HELMBRECHT MICHAEL ALBERT |
分类号 |
F16F1/18;G02B26/06;G02B26/08;H01H59/00 |
主分类号 |
F16F1/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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