发明名称 Integrated circuit having a Fin structure
摘要 Embodiments of the invention relate generally to a method for manufacturing an integrated circuit, a method for manufacturing a cell arrangement, an integrated circuit, a cell arrangement, and a memory module. In an embodiment of the invention, a method for manufacturing an integrated circuit having a cell arrangement is provided, including forming at least one semiconductor fin structure having an area for a plurality of fin field effect transistors, wherein the area of each fin field effect transistor includes a first region having a first fin structure width, a second region having a second fin structure width, wherein the second fin structure width is smaller than the first fin structure width. Furthermore, a plurality of charge storage regions are formed on or above the second regions of the semiconductor fin structure.
申请公布号 US7700427(B2) 申请公布日期 2010.04.20
申请号 US20070762582 申请日期 2007.06.13
申请人 QIMONDA AG 发明人 SPECHT MICHAEL;HOFMANN FRANZ;ROESNER WOLFGANG;ILICALI GUERKAN
分类号 H01L21/8238 主分类号 H01L21/8238
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