发明名称 Printing apparatus and device manufacturing method
摘要 The printing apparatus, presented herein, comprises a patterning device having a curved member that supports a stamp on its surface. The curved member is adapted to roll over a substrate to be printed on to transfer the pattern onto the substrate. An illumination system directs light onto the region of the substrate that is being printed in order to set a layer of resist, which has been sprayed onto the substrate. The light is directed via a pattern that is made on the surface of the stamp, thereby transferring the pattern to the substrate.
申请公布号 US7698999(B2) 申请公布日期 2010.04.20
申请号 US20050068040 申请日期 2005.03.01
申请人 ASML NETHERLANDS B.V. 发明人 SIMON KLAUS
分类号 B41F31/00;G03F7/20;B05C1/06;B05C1/08;B05D3/00;H01L21/027 主分类号 B41F31/00
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