发明名称 |
Method of fabricating optical device using multiple sacrificial spacer layers |
摘要 |
The present invention is a method of fabricating an optical device using multiple sacrificial spacer layers. The first step in this process is to fabricate the underlying base structure and deposit an optical structure thereon. A facet is then created at the ends of the optical structure and alternating sacrificial and intermediate layers are fabricated on the device. A mask layer is deposited on the structure, with openings created in the layers to allow use of an etchant. User-defined portions of the spacer layers are subsequently removed with the etchant to create air gaps between the intermediate layers.
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申请公布号 |
US7700387(B1) |
申请公布日期 |
2010.04.20 |
申请号 |
US20090454023 |
申请日期 |
2009.05.05 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE DIRECTOR, NATIONAL SECURITY AGENCY |
发明人 |
FITZ JOHN L.;HINKEL DANIEL S.;HORST SCOTT C. |
分类号 |
H01L21/8252;H01S5/028 |
主分类号 |
H01L21/8252 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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