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发明名称
Substrate transfer device for semiconductor deposition apparatus
摘要
申请公布号
USD614152(S1)
申请公布日期
2010.04.20
申请号
US20090331021F
申请日期
2009.01.16
申请人
ASM GENITECH KOREA, LTD.
发明人
LEE JEONG HO;JEONG SANG JIN;CHOI YOUNG SEOK
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