| 摘要 |
PURPOSE: A substrate arrangement apparatus is provided to efficiently transfer a substrate by floating the substrate with a high pressure air and subsequently arranging the substrate. CONSTITUTION: A substrate support stand supports a substrate(S). Reference units(111, 112) provide the first side of the substrate. Air blowers(121, 122) sprays from the lateral side of a second side. The second side opposes to the first side. A high pressure air is sprayed toward the lower side of the substrate in order to float the substrate. The air blowers include injection holes.
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