发明名称 |
Method and device for the plasma treatment of workpieces |
摘要 |
The invention relates to a method and a device which are used for the plasma treatment of work pieces. Said work piece is inserted into an at least partially evacuatable chamber of a treatment station (3) and the work piece is positioned inside the treatment station of retaining elements. At least one operating agent is at least partially impinged upon by a transporting device (44) which is displaced together with the treatment station on a closed and rotating transport path.
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申请公布号 |
US7699933(B2) |
申请公布日期 |
2010.04.20 |
申请号 |
US20050515609 |
申请日期 |
2005.05.31 |
申请人 |
KHS CORPOPLAST GMBH & CO. KG |
发明人 |
LIZENBERG MICHAEL;LEWIS FRANK;MUELLER HARTWIG;VOGEL KLAUS;ARNOLD GREGOR;BEHLE STEPHAN;LUETTRINGHAUS-HENKEL ANDREAS;BICKER MATTHIAS;KLEIN JUERGEN |
分类号 |
A61L2/14;C23C16/00;B01J19/08;B05D7/22;B05D7/24;B08B7/00;B08B9/42;B29C49/42;B65D23/02;B65G29/00;C03C17/00;C23C14/04;C23C14/50;C23C16/04;C23C16/40;C23C16/44;C23C16/458;C23C16/511;C23C16/54 |
主分类号 |
A61L2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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