发明名称 |
Orientation-independent multi-layer BEOL capacitor |
摘要 |
A plurality of interdigitized conductive fingers are arranged to form a substantially square configuration in each of a plurality of layers separated by a high dielectric constant material, wherein each of the plurality of interdigitized conductive fingers includes at least one bend of substantially ninety degrees. The plurality of interdigitized conductive fingers includes a first set of fingers that are connected to an anode terminal, and a second set of fingers that are connected to a cathode terminal. The plurality of layers includes a bottommost layer that is in closest proximity to a substrate relative to other layers of the plurality of layers. The bottommost layer does not include any fingers connected to the anode terminal.
|
申请公布号 |
US7701037(B2) |
申请公布日期 |
2010.04.20 |
申请号 |
US20070831208 |
申请日期 |
2007.07.31 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHINTHAKINDI ANIL K.;THOMPSON ERIC |
分类号 |
H01L29/00 |
主分类号 |
H01L29/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|