发明名称 Device for the zonal surface treatment of an article by dielectric barrier discharge
摘要 The invention relates to equipment for area-based surface treatment of an article by electric dielectric barrier discharge in the presence of a non-atmospheric controlled gaseous mixture, comprising a hollow metal electrode enabling the gaseous mixture to circulate therewithin and the mixture to be transported to a discharge area, whereby said electrode is divided into individual elements which can each be pivoted about a central axis to ensure sufficient distance between the element which is considered as being pivoted and the area of the article opposite the element in question so that the discharge cannot develop; the central pivoting axis is used as a channel for the circulation of the gaseous mixture inside the electrode and is provided with openings enabling the gaseous mixture to be evacuated to the discharge area; pivoting one of the elements of the electrodes blocks up the evacuating opening associated therewith and the gaseous mixture can only be evacuated via the evacuating openings of non-pivoted elements.
申请公布号 US7699022(B2) 申请公布日期 2010.04.20
申请号 US20040556949 申请日期 2004.05.07
申请人 L'AIR LIQUIDE, SOCIETE ANONYME A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE 发明人 VILLERMET ALAIN;COEURET FRANCOIS;DELUMEAU JACQUES
分类号 C23C16/00;C23C16/44;C23C16/455;C23C16/54;C23F1/00;H01L21/306 主分类号 C23C16/00
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