发明名称 Laser fuse structures for high power applications
摘要 The present invention relates to a laser fuse structure for high power applications. Specifically, the laser fuse structure of the present invention comprises first and second conductive supporting elements (12a, 12b), at least one conductive fusible link (14), first and second connection elements (20a, 20b), and first and second metal lines (22a, 22b). The conductive supporting elements (12a, 12b), the conductive fusible link (14), and the metal lines (22a, 22b) are located at a first metal level (3), while the connect elements (20a, 20b) are located at a second, different metal level (4) and are connected to the conductive supporting elements (12a, 12b) and the metal lines (22a, 22b) by conductive via stacks (18a, 18b, 23a, 23b) that extend between the first and second metal levels (3, 4).
申请公布号 US7701035(B2) 申请公布日期 2010.04.20
申请号 US20050164640 申请日期 2005.11.30
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 GRECO STEPHEN E.;HEDBERG ERIK L.;JUNG DAE-YOUNG;MCLAUGHLIN PAUL S.;MUZZY CHRISTOPHER D.;ROHRER NORMAN J.;WYNNE JEAN E.
分类号 H01L23/525;H01L21/768 主分类号 H01L23/525
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