| 摘要 |
<p>PURPOSE: A flow rate control apparatus is provided to prevent the corrosion of a regulator adjusting the operation pressure of a flow control valve by controlling the supply and exhaust of gases to and from the flow control valve. CONSTITUTION: A flow rate control apparatus comprises a first regulator(20), a second regulator(18), a gas path(15), and a cross path(40). The first regulator with a diaphragm controls the flow rate of fluid contacting with one side by applying an operating pressure using the gas provided to the other side, wherein the operating pressure is regulated by controlling the supply and exhaust of the gas to and from the first regulator. The gas path enables the gas flow between the first and second regulators. The cross path enables the control of the operating pressure by the second regulator and discharges the gas from the gas path.</p> |
