发明名称 Specimen holder with integral ion beam screen and in situ adjustment
摘要 An apparatus for holding a specimen to be viewed in a focused beam microscope, which can be an electron microscope or a focused ion beam microscope. The apparatus has a base and a specimen carriage with specimen mounting surface in a first plane and an ion beam screen or knife blade. The relative position between the ion beam screen and the specimen carriage are remotely adjustable while the apparatus is mounted in the focused beam microscope. In a further embodiment, the apparatus is transferable between an ion beam milling device and the focused beam microscope while the milling device and the microscope share a common vacuum.
申请公布号 US7700917(B1) 申请公布日期 2010.04.20
申请号 US20070867275 申请日期 2007.10.04
申请人 GATAN, INC. 发明人 GALLOWAY SIMON;VINCE RICHARD
分类号 H01J37/30 主分类号 H01J37/30
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