发明名称 |
Remote center compliant flexure device |
摘要 |
An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system to move about a plurality of axes. An actuation system is coupled to the flexure system to selectively constrain movement of the body along a subset of the plurality of axes. |
申请公布号 |
US7701112(B2) |
申请公布日期 |
2010.04.20 |
申请号 |
US20090421170 |
申请日期 |
2009.04.09 |
申请人 |
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM |
发明人 |
CHOI BYUNG-JIN;SREENIVASAN SIDIGATA V.;JOHNSON STEPHEN C. |
分类号 |
H01L41/08;B29B13/08;B29C35/08;B29C59/02;G03F7/00 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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