| 摘要 |
<p>PURPOSE: A breaking apparatus for fragile substrate and a method for the same are provided to improve manufacture yield without smudges on the fragile substrate. CONSTITUTION: A breaking apparatus for fragile substrate comprises a steam generating unit, steam heating unit, and steam spraying unit. The steam generating unit includes a first chamber(100), nozzle(300), and first heater. The nozzle sprays a liquid with heat transmission and expansion property into the first chamber. The first heater heats the liquid in the first chamber and transforms it to wet saturated steam or dry saturated steam. The steam heating unit is equipped with a second chamber(200) and second heater(400). The second chamber communicates with the first chamber. The second heater heats the wet saturated steam or dry saturated steam. The steam spraying unit sprays the steam to the fragile substrate in order to spread cracks on a scribe line.</p> |
