发明名称 REDUCED BOTTOM ROUGHNESS OF STRESS BUFFERING ELEMENT OF A SEMICONDUCTOR COMPONENT
摘要 The present invention relates to a stress buffering package (49) for a semiconductor component, with a semiconductor substrate (52); an I/O pad (54), electrically connected to the semiconductor substrate (52); a stress buffering element (74) for absorbing stresses, electrically connected to the I/O pad (54); an underbump metallization (70), electrically connected to the stress buffering element (74); a solder ball (60), electrically connected to the underbump metallization (70); a metal element (61) between the solder ball (60) and the semiconductor substrate (52); a passivation layer (56, 58), which protects the semiconductor substrate (52) and the metal element (61) and which at least partially exposes the I/O pad (54); characterized in that a roughness of an interface between the stress buffering element (74) and the passivation layer (56, 58) is lower than a roughness of an interface between the metal element (61) and the passivation layer (56, 58). Furthermore the invention relates a method for manufacturing a stress buffering package (49) for a semiconductor component.
申请公布号 KR20100039895(A) 申请公布日期 2010.04.16
申请号 KR20107004412 申请日期 2008.07.15
申请人 NXP B.V. 发明人 HOCHSTENBACH HENDRIK
分类号 H01L23/31;H01L23/485 主分类号 H01L23/31
代理机构 代理人
主权项
地址