PURPOSE: A plasma process apparatus is provided to precisely control the temperature of a shower head by attaching a cooling unit which cools the shower head based on the circulation of a coolant. CONSTITUTION: A chamber(100) provides a space for processing a substrate(S). The upper electrode(110) and the lower electrode(120) are arrange on the upper side and the lower side of the chamber. The upper electrode includes a shower head body, a shower head(112) and a cooling unit(116). The shower head forms a diffusion hole for a fine process gas. The cooling unit contacts to the upper side of the shower head to cool the shower head. A flow path is formed in the coolant to circulate a coolant.
