| 摘要 |
PURPOSE: An apparatus for forming a vacuum thin film is provided to improve homogeneity of a coating film by freely controlling an fixed angle of a product using a ball joint and to maintain the quality of the product by uniformly injecting a target metal particle. CONSTITUTION: An apparatus for forming a vacuum thin film comprises a vacuum container(10), a door(20), a jig(30), a target(50), and a mask(60). The door opens and closes the vacuum container. The jig is connected to an anode. A target is installed to a cathode. The cathode is installed on the inner circumference of the vacuum container. The mask is installed on front both sides of the target.
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