| 摘要 |
<p>BACK END PHOTORESIST STRIPPERS AND CLEANING COMPOSITIONS OF THIS INVENTION ARE PROVIDED BY AMINO ACID-FREE, NON-AQUEOUS CLEANING COMPOSITIONS THAT ARE ESSENTIALLY NON-CORROSIVE TOWARD COPPER AS WELL AS ALUMINUM ARID THAT COMPRISE AT LEAST ONE POLAR ORGANIC SOLVENT, AT LEAST ONE HYDROXYLATED ORGANIC AMINE, AND AT LEAST ONE TORROSION INHIBITOR COMPOUND WITH MULTIPLE HYDROXYL FUNCTIONAL GROUPS THAT IS A COMPOUND OF THE FORMULA: TI-[(CR1 R2)m-(CR3R4)n]p-(CR5R6)q- T 2 WHERE AT LEAST ONE OF R1 AND R2 OH AND IF ONE OF R1 AND R2 IS NOT OH, IT IS SELECTED FROM H, ALKYL OR ALKOXY, M IS A WHOLE INTEGER OF 1 OR GREATER,R3 AND R4 ARE SELECTED FROM H, ALKYL OR ALKOXY, N IS 0 OR A GREATER WHOLE POSITIVE INTEGER, P IS A WHOLE INTEGER OF 1 OR GREATER; AT LEAST ONE OF R5 AND R6 IS OH AND IF ONE OF R5 AND R6 IS NOT OH, IT IS SELECTED FROM H, ALKYL OR ALKOXY, Q IS A WHOLE INTEGER OF 1 OR IS GREATER; T 1 AND T 2 ARE SELECTED FROM H, ALKYL, HYDROXYALKYL, POLYHYDROXYALKYL, AMINOALKYL, CARBONYLALKYL OR AMIDE GROUPS OR T 1 AND T 2 MAY BE CONNECTED FORMING A STRUCTURE SELECTED FROM AN ALIPHATIC CYCLIC OR FUSED CYCLIC STRUCTURE, AND OPTIONALLY ONE OR MORE OF HYDROXYL-CONTAINING CO-SOLVENT CORROSION INHIBITING ARYL COMPOUND CONTAINING TWO OR MORE OH, OR6, AND/OR SO2R6R7 GROUPS BONDED DIRECTLY TO THE AROMATIC RING, WHERE R6,R7 AND R6 ARE EACH INDEPENDENTLY SELECTED FROM THE GROUP CONSISTING OF ALKYL AND ARYL, METAL COMPLEXING AGENT, A DIFFERENT METAL CORROSION INHIBITING COMPOUND, AND SURFACTANT.</p> |
