| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that a circuit pattern defect inspection using an image processing identifies projecting and recessed defects in a thickness direction of a pattern as dark points viewed from a camera side, but since reflected light from the upper surface of the pattern decreases along with thinning the circuit pattern, and the whole pattern becomes dark, the projecting and recessed defects in the thickness direction are hardly recognized. Ž<P>SOLUTION: An object to be inspected is irradiated with light in a direction of tilting at an angle of 50-80 degrees in regard to the object to be inspected, in order to cause the light to be reflected by tilted surfaces of projecting and recessed portions, thereby detecting the projecting and recessed defects as high brightness points in a screen being dark as a whole. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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