| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of measuring capacitance of an MOS capacitor capable of accurately and easily measuring the capacitance even for the MOS capacitor formed on a semiconductor wafer. SOLUTION: An inductor L is inserted in series to a measurement circuit connected to a probe; an alternating current is applied to a measurement object MOS capacitor 10 formed on a semiconductor wafer from an A.C. power source through the probe to obtain the resonance frequency of the measurement object MOS capacitor 10, and the capacitance of the measurement object MOS capacitor 10 is obtained from the resonance frequency by calculation. COPYRIGHT: (C)2010,JPO&INPIT
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