发明名称 SEMICONDUCTOR CHIP, MOUNTING BOARD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for autonomously controlling the position and posture of a small-sized semiconductor chip on a mounting board. SOLUTION: A semiconductor chip carrying and alignment method for carrying the semiconductor chip formed into a chip to the electrode of a board in a desired position and posture comprises processes of separately providing a layer comprising a hydrophilic material and a layer comprising a hydrophobic material in a region excluding the electrode on the surface of the semiconductor chip including the semiconductor chip in a droplet, carrying it to the electrode of the mounting board and connecting the semiconductor chip to the electrode of the mounting board. In the processes, the semiconductor chip autonomously controls the alignment of the relative position and posture with the mounting board by the action of the hydrophilic material and the hydrophobic material of the semiconductor chip and a droplet. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010087066(A) 申请公布日期 2010.04.15
申请号 JP20080252089 申请日期 2008.09.30
申请人 HITACHI LTD 发明人 HASEBE TAKEHIKO;MINAGAWA MADOKA;YAMAGUCHI YOSHIHIDE;ISADA NAOYA
分类号 H01L21/60;H01L23/12 主分类号 H01L21/60
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