DEVICE AND METHOD FOR IMPRESSING STRUCTURES IN A SUBSTRATE, IN PARTICULAR IN OPTICAL DATA STORAGE MEDIA, SEMICONDUCTOR STRUCTURES AND MICROSTRUCTURES

摘要

In the manufacture of optical data storage media, data structures are impressed into the substrate (2) in a protective chamber under vacuum. The impression head (4) forms the chamber cover through a flexible seal (20, 21) between the impression head (4) and the support (1) holding the substrate (2) to be impressed. This enables the chamber volume to be reduced and thus low pumping and cycle times as well as good access by the impression head (4). In addition, a self-sealing coupling can be used in the supply canal (101 to 105) between the chamber and the working pressure generating device (100). This makes it possible to quickly exchange the stamper (3) attached to the impression head (4) as a result of the good accessibility of the chamber interior.