METHOD OF INSERTION INTO NANOPORES OF POLYMER PRECURSOR USING VACUUM EFFECT AND METHOD FOR PRECISION DUPLICATION OF NANOPATTERN USING SAME

摘要

The present invention relates to a method of insertion into the nanopores of a polymer precursor using vacuum effects, and a method for precise duplication of a nanopattern using same, and more specifically to a technique wherein a viscous fluid such as a polymer precursor is freely inserted into fine pores of several to tens of nanometers in size to transfer a fine pattern onto a large-area polymer substrate over tens to hundreds of square centimeters in a precisely controlled form. To this end, the present invention provides a method for inserting viscous fluid into a mold having fine holes of nanometer scale, wherein after said fine holes have been filled with a certain gas by exposure, exposure is then made to a solvent the solubility whereof is high for said certain gas so that said fine pores are filled with said solvent by the negative pressure effect (vacuum effect) that is suddenly and instantaneously generated at said fine pores, and other solvents that mix well with said solvent are then exposed in sequence so that a gradual exchange is made with said viscous fluid.