KINEMATIC CHUCKS FOR RETICLES AND OTHER PLANAR BODIES

摘要

Devices are disclosed for holding and moving a planar body such as a reticle (25) as used, for example, in microlithography. An exemplary device includes a stage (12) and a body chuck (10). The stage has a movable support surface (17a, 17b). A proximal region (18a, 18b) of a first membrane (16a, 16b) is mounted to the support surface. A distal region (20a, 20b) of the first membrane extends from the support surface and is coupled to the chuck such that the first membrane at least partially supports the chuck. The chuck includes a surface (28) from wh'ich multiple pins (38,40,44) extend. The surface is situated at the distal region. The pins are arrayed to contact and support a respective region of the body. The pin arrangement is configured such that, during- movements of the chuck imparted by the support surface, body slippage relative to the pins due to forces caused by the movement is substantially uniform at each pin.