ELASTIC WAVE SENSOR AND DETECTION METHOD USING THE ELASTIC WAVE SENSOR

摘要

Provided is an elastic wave sensor having a high sensibility, an excellent sensing reproducibility, and stability.  Provided also is a detection method using the elastic wave sensor. The elastic wave sensor (1) includes: [a] a piezoelectric substrate (6); [b] an elastic wave element having an electrode (3A) formed on the piezoelectric substrate (6); and [c] a reaction film (8) formed on an elastic wave element and having a mass reduced by a direct or indirect chemical reaction with a material to be measured.  The material to be measured is detected by detecting the mass change caused by the reaction film (8) to the elastic wave element in accordance with a frequency change.