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发明名称
Vorrichtung und Verfahren zum Bewegen eines Substrats
摘要
申请公布号
DE112007003490(T5)
申请公布日期
2010.04.15
申请号
DE20071103490T
申请日期
2007.05.07
申请人
SYMYX SOLUTIONS INC.
发明人
LAMBERT, STEPHEN MARK;MULLINS, DENNIS;TA, CUONG MANH
分类号
C23C16/00
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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