| 摘要 |
The invention provides a system (1) for positioning an object, comprising a fixed base (2), a support (3) for the object, an actuator (4) for applying a force to displace the support (3) relative to the fixed base (2), a sensor (5) for measuring the load force on the support (3), and a controller (6) for processing the measured load force to control the position of the support (3) and/or damp at least one resonance frequency of the system (1). The invention also provides a method (10) of controlling the system (1). |
